박막두께 예측을 위한 증착 공정 모델링에 관한 연구

Study on Evaporating Process Modeling for Estimation of Thin-film Thickness Distribution

In order to design an evaporation system, geometric simulation of film thickness distribution profile is required. In this paper, a geometric modeling algorithm is introduced for process simulation of the evaporating process. The physical fact of the evaporating process is modeled mathematically. Based on the developed method, the thickness of the thin-film layer can be successfully controlled.