Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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RF Magnetron Sputter에 의해 제조된 ITO/Ag/AZO 다층박막의 전기적.광학적 특성

  • 김민환 (한국기술교육대학교 신소재공학과) ;
  • 안진형 (한국기술교육대학교 신소재공학과) ;
  • 김상호 (한국기술교육대학교 신소재공학과)
  • Published : 2006.10.12
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Abstract

ITO/Ag/AZO and AZ0/Ag/ITO multi-layer films deposited on glass substrate by RF magnetron sputtering have a much better electrical properties than ITO and AZO single-layer films. The multi-layer structure was consisted of three layers of ITO, Ag and AZO. The optimum working pressure of AZO layers deposition was determined to be $1.0{\times}10^{-2}$ torr for high optical transmittance and good electrical conductivity. The electrical and optical properties of sub/IT0/Ag/AZO were higher than those of sub/AZ0/Ag/ITO multi-layer films.

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