한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 추계학술대회 논문집 광주전남지부
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- Pages.81-86
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- 2006
원통형 Inductively Coupled Plasma (ICP) 광원 모드변환의 안테나 의존성
Antenna Dependancy of Mode Transition in Cylindrical Inductively Coupled Plasma (ICP)
- Choi, Yong-Sung (Dongshin University) ;
- Cho, Soo-Young (Sunghwa College) ;
- Kim, Young-Keun (Kwangju Health College) ;
- Kim, Chang-Bok (Kwangju Health College) ;
- Lee, Kyung-Sup (Dongshin University)
- 발행 : 2006.12.01
초록
In this paper, we designed the cylindrical type light source that had a electromagnetic principle of inductively coupled plasma, and measured its electrical-optical properties. Using the principle of transformer, electrically equivalent circuit of cylindrical type light source was analyzed. According to the parameters of electromagnetic induction which were diameter of coil with 0.3~1.2 mm, number of turns with 4~12 turns, distance with 40~120 mm and RF power with 10~150 W, the electrical and optical properties were measured. When diameter of coil was 0.3 mm, number of turns was 8 turns and distance was 40 mm, the highest brightness of 29,730