한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 영호남 합동 학술대회 및 춘계학술대회 논문집 센서 박막 기술교육
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- Pages.133-135
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- 2006
스퍼터링 및 후 열처리 조건변화에 따른 SBN 강유전체 박막의 배향성에 관한 연구
Effect of Sputtering and Post-Annealing Condition on The Orientation of SBN Thin Films
- Lee, Chae-Jong (School of Science and Materials Engineering, Yeungnam University) ;
- Lee, Hee-Young (School of Science and Materials Engineering, Yeungnam University)
- 발행 : 2006.05.19
초록
SBN60 and SBN60/30 thin films were deposited by ion beam sputtering technique. Using the ceramic target of the same composition and Pt(100)/