한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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- Pages.553-554
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- 2006
광원용 탄소박막의 합성
Fabrication of Carbon Film for New Light Source
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Lee, Sang-Heon
(Dept. of Electronic Eng. Sun Moon University) ;
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Choi, Young-Sung
(Dept. of Electric Eng. Dongshin Univ.) ;
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Park, Dae-Hee
(Dept. of Electric Eng. Wonkwang Univ.)
- 발행 : 2006.06.22
초록
Carbon films was grown on Si substrates using the method of electrolysis for methanol liquid. Deposition parameters for the growth of the carbon films were current density for the electrolysis. methanol liquid temperature and electrode spacing between anode and cathode. We examined electrical resistance and the surface morphology of carbon films formed under various conditions specified by deposition parameters. It was clarified that the high electrical resistance carbon films with smooth surface morphology are grown when a distance between the electrodes was relatively wider. We found that the electrical resistance in the films was independent of both current density and methanol liquid temperature for electrolysis. The temperature dependence of the electrical resistance in the low resistance carbon films was different from one obtained in graphite.