Characteristics of $Bi_2Sr_2Ca_{n-1}Cu_nO_x$ Thin Films Fabricated for apply to Biomedical Sensors

의용센서에 응용하기 위해 제작한 $Bi_2Sr_2Ca_{n-1}Cu_nO_x$ 박막의 특성

$Bi_2Sr_2Ca_{n-1}Cu_nO_x$ superconducting thin films have been fabricated by atomic layer-by-layer deposition using IBS(Ion Beam Sputtering) method During the deposition, 90 mol% ozone gas of typical pressure of $1{\sim}9{\times}10^{-5}$ T orr are supplied with ultraviolet light irradiation for oxidation. XRD and RHEED investigations reveal out that a buffer layer with some different compositions is formed at the early deposition stage of less than 10 units cell and then Bi-2201 oriented along the c-axis is grown.