한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
- /
- Pages.192-193
- /
- 2006
스핀 코팅법으로 증착한 $(Bi,La)_4Ti_3O_{12}$ 박막의 후속 열공정에 따른 입자 크기 및 결정 방향성 변화
Thermal Process Effects on Grain Size and Orientation in $(Bi,La)_4Ti_3O_{12}$ Thin Film Deposited by Spin-on Method
- Kim, Young-Min (Chung-Buk Univ.) ;
- Kim, Nam-Kyeong (Hynix Semiconductor Inc.) ;
- Yeom, Seung-Jin (Hynix Semiconductor Inc.) ;
- Jang, Gun-Eik (Chung-Buk Univ.) ;
- Ryu, Sung-Lim (Chungju Univ.) ;
- Kweon, Soon-Yong (Chungju Univ.)
- 발행 : 2006.11.09
초록
A 16Mb ITIC FeRAM device was fabricated with BLT capacitors. The average value of the switchable 2 polarization obtained m the 32k-array (unit capacitor size: 068
키워드