한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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- Pages.1182-1184
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- 2006
Fabrication of the Poly-Si Thin Film Transistor on the Mica Substrate
- Lee, Seung-Ryul (Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology) ;
- Lee, Jin-Ho (Electronics and Telecommunications Research Institute) ;
- Ahn, Byung-Tae (Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology)
- 발행 : 2006.08.22
초록
A mica has been introduced as a new substrate material for the fabrication of the poly-Si TFTs. A poly-Si film is produced on the mica substrate at
키워드