한국정보디스플레이학회:학술대회논문집
- 2006.08a
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- Pages.601-604
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- 2006
Transparent ZnO Transistor Array by Means of Plasma Enhanced Atomic Layer Deposition
- Kopark, Sang-Hee (Organic Display Team, ETRI) ;
- Hwang, Chi-Sun (Organic Display Team, ETRI) ;
- Kwack, Ho-Sang (Organic Display Team, ETRI) ;
- Lee, Jung-Ik (Organic Display Team, ETRI) ;
- Chu, Hye-Yong (Organic Display Team, ETRI)
- Published : 2006.08.22
Abstract
We have developed ZnO TFT array using conventional photolithography and wet etching processes. Transparent 20 nm of ultra thin ZnO film deposited by means of plasma enhanced atomic layer deposition at
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