Preconditions for High Speed Confocal Image Acquisition with DMD Scanning.

  • Shim, S.B. (School of physics and astronomy, Seoul National University) ;
  • Lee, K.J. (School of physics and astronomy, Seoul National University) ;
  • Lee, J.H. (School of physics and astronomy, Seoul National University) ;
  • Hwang, Y.H. (Department of Electronical Engineering, Korea University) ;
  • Han, S.O. (Department of Electronical Engineering, Korea University) ;
  • Pak, J.H. (Department of Electronical Engineering, Korea University) ;
  • Choi, S.E. (Department of physics, Incheon University) ;
  • Milster, Tom D. (Optical Data storage Center, OSC, University of Arizona) ;
  • Kim, J.S. (School of physics and astronomy, Seoul National University)
  • Published : 2006.07.01

Abstract

Digital image-projection and several modifications are the classical applications of Digital Micromirror Devices (DMD), however further applications in the field of optical metrology are also available. Operated with certain patterns, a DMD can function, for instance, as an array of pinholes that may substitute the Galvanic mirror or the stage scanning system presently used for 2 dimensional scanning in confocal microscopes. The various process parameters that influence the result of measurement (e.g. pinhole size, lateral scanning pitch and the number of pinholes used simultaneously, etc.) should be configured precisely for individual measurements by appropriately operating the DMD. This paper presents suitable conditions for the diffraction limited analysis between DMD-optics-CCD to achieve the best performance. Also sampling theorem that is necessary for the image acquisition by scanning system is simulated with OPTISCAN which is the simulator based on the diffraction theory.

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