대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.121-122
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- 2006
TFT의 길이와 두께에 관한 특성
Characterization of length and width of poly-silicon thin film transistors
- 이정인 (성균관대학교 정보통신소자연구실) ;
- 황성현 (성균관대학교 정보통신소자연구실) ;
- 정성욱 (성균관대학교 정보통신소자연구실) ;
- 장경수 (성균관대학교 정보통신소자연구실) ;
- 이광수 (성균관대학교 정보통신소자연구실) ;
- 정호균 (삼성 SDI) ;
- 최병덕 (삼성 SDI) ;
- 이기용 (삼성 SDI) ;
- 이준신 (성균관대학교 정보통신소자연구실)
- Lee, Jeoung-In (School of Information and Communication Englnnerlng, Sungkyunkwon University) ;
- Hwang, Sung-Hyun (School of Information and Communication Englnnerlng, Sungkyunkwon University) ;
- Jung, Sung-Wook (School of Information and Communication Englnnerlng, Sungkyunkwon University) ;
- Jang, Kyung-Soo (School of Information and Communication Englnnerlng, Sungkyunkwon University) ;
- Lee, Kwang-Soo (School of Information and Communication Englnnerlng, Sungkyunkwon University) ;
- Chung, Ho-Kyoon (SAMSUNG SDl CO., LTD) ;
- Choi, Byoung-Deog (SAMSUNG SDl CO., LTD) ;
- Lee, Ki-Yong (SAMSUNG SDl CO., LTD) ;
- Yi, Jun-Sin (School of Information and Communication Englnnerlng, Sungkyunkwon University)
- 발행 : 2006.10.27
초록
Recently, poly-Si TFT-LCD starts to be mass produced using excimer laser annealing (ELA) poly-Si. The main reason for this is the good quality poly-Si and large area uniformity. We report the influence of channel length and width on poly-Si TITs performance. Transfer characteristics of n-channel poly-Si thin film transistors fabricated on polycrystalline silicon (poly-Si) thin film transistors (TFTs) with various channel lengths and widths of
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