Super Chip Integration Based on Chip-to-Wafer 3D Integration Technology

  • Tanaka, Tetsu (Department of Bioenginerring and Robotics, Graduate School of Engineering, Tohoku Univ.) ;
  • Fukushima, T. (Department of Bioenginerring and Robotics, Graduate School of Engineering, Tohoku Univ.) ;
  • Koyanagi, M. (Department of Bioenginerring and Robotics, Graduate School of Engineering, Tohoku Univ.)
  • Published : 2006.10.11