Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2006.11a
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- Pages.15.1-15.1
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- 2006
Effect of Organic Additives in Ceria Slurry on Enhanced Oxide-to-Nitride Removal Selectivity in Shallow Trench Isolation Chemical Mechanical Polishing
- Lee, Byeong-Seog (Nano-SOI Process Lab. Hanyang University) ;
- Kang, Hyun-Goo (Nano-SOI Process Lab. Hanyang University) ;
- Park, Kyung-Woong (Nano-SOI Process Lab. Hanyang University) ;
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Paik, Un-Gyu
(Department of Ceramic Engineering, Hanyang University)
;
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Park, Jea-Gun
(Nano-SOI Process Lab. Hanyang University)
- Published : 2006.11.03