Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2006.07c
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- Pages.1663-1664
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- 2006
Fabrication Technology of DLC for New Light Source
광원 적용을 위한 DLC합성
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Lee, Sang-Heon
(Department of Electronic Engineering Sun Moon University) ;
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Park, Dae-Hee
(Wonkwang University)
- Published : 2006.07.12
Abstract
Carbon films was grown on Si substrates using the method of electrolysis for methanol liquid. Deposition parameters for the growth of the carbon films were current density for the electrolysis, methanol liquid temperature and electrode spacing between anode and cathode. We examined electrical resistance and the surface morphology of carbon films formed under various conditions specified by deposition parameters. It was clarified that the high electrical resistance carbon films with smooth surface morphology are grown when a distance between the electrodes was relatively wider. We found that the electrical resistance in the films was independent of both current density and methanol liquid temperature for electrolysis. The temperature dependence of the electrical resistance in the low resistance carbon films was different from one obtained in graphite.
Keywords