Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2006.07c
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- Pages.1380-1381
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- 2006
Etch mechanism of MgO thin films for next generation devices
차세대 소자를 위한 MgO thin films 의 식각 특성
- Woo, Jong-Chang (School of Electrical and Electronics Engineering, Chung-Ang University) ;
- Kim, Gwan-Ha (School of Electrical and Electronics Engineering, Chung-Ang University) ;
- Kim, Chang-Il (School of Electrical and Electronics Engineering, Chung-Ang University)
- Published : 2006.07.12
Abstract
본 연구는 MgO 박막을 유도 결합 플라즈마를 이용하여,
Keywords