대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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- Pages.1313-1314
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- 2006
LPCVD에 의한 다결정 3C-SiC 결정성장에 관한 연구
Study for polycrystalline 3C-SiC thin films growth by LPCVD
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Kim, Kang-San
(School of Electrical Eng., University of Ulsan) ;
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Chung, Gwiy-Sang
(School of Electrical Eng., University of Ulsan)
- 발행 : 2006.07.12
초록
The polycrystalline 3C-SiC thin films heteroepitaxially grown by LPCVD method using single precursor 1,3-disilabutane at
키워드