대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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- Pages.1311-1312
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- 2006
다결정 3C-SiC/TiW Ohmic Contact에 관한 연구
Study for ohmic contact of polycrystalline 3C-SiC/TiW
- On, Chang-Min (School of Electrical Eng., University of Ulsan) ;
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Chung, Gwiy-Sang
(School of Electrical Eng., University of Ulsan)
- 발행 : 2006.07.12
초록
This paper describes the ohmic contact formation between a TiW film as a contact material deposied by RF magnetron sputter and polycrystalline 3C-SiC films deposied on thermally grown Si wafers. The specific contact resistance (
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