Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2006.07c
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- Pages.1313-1314
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- 2006
Study for polycrystalline 3C-SiC thin films growth by LPCVD
LPCVD에 의한 다결정 3C-SiC 결정성장에 관한 연구
- Kim, Kang-San (School of Electrical Eng., University of Ulsan) ;
- Chung, Gwiy-Sang (School of Electrical Eng., University of Ulsan)
- Published : 2006.07.12
Abstract
The polycrystalline 3C-SiC thin films heteroepitaxially grown by LPCVD method using single precursor 1,3-disilabutane at
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