한국레이저가공학회:학술대회논문집 (Proceedings of the Korean Society of Laser Processing Conference)
- 한국레이저가공학회 2005년도 추계학술발표대회 논문집
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- Pages.37-41
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- 2005
평판 디스플레이용 Laser Direct Imaging에 관한 연구( I )
A Study on the Laser Direct Imaging for FPD ( I )
- Kang, H.S. (Production Engineering Research Institute, LG Electronics Inc.) ;
- Kim, K.R. (Production Engineering Research Institute, LG Electronics Inc.) ;
- Kim, H.W. (Production Engineering Research Institute, LG Electronics Inc.) ;
- Hong, S.K. (Production Engineering Research Institute, LG Electronics Inc.)
- 발행 : 2005.11.11
초록
When screen size of the Flat Panel Display (FPD) becomes larger, the traditional photo-lithography using photomasks and UV lamps might not be possible to make patterns on Photo Resist (PR) material due to limitation of the mask size. Though the maskless photo-lithography using UV lasers and scanners had been developed to implement large screen display, it was very slow to apply the process for mass-production systems. The laser exposure system using 405 nm semi-conductor lasers and Digital Micromirror Devices (DMD) has been developed to overcome above-mentioned problems and make more than 100 inches FPD devices. It makes very fine patterns for full HD display and exposes them very fast. The optical engines which contain DMD, Micro Lens Array (MLA) and projection lenses are designed for 10 to 50
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