Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2005.08a
- /
- Pages.159-159
- /
- 2005
저온 프로세스에 의한 다결정 실리콘계 박막 제작
- Choi, Byoung-Jung (Division of Electronics and Information, Chonbuk National University) ;
- Yang, Sung-Chae (Division of Electronics and Information, Chonbuk National University) ;
- Chu, Byung-Yoon (Division of Electronics and Information, Chonbuk National University) ;
- Lee, Jung-Hui (Division of Electronics and Information, Chonbuk National University) ;
- Yatsui, Kiyoshi (Extreme Energy-desity Research Institute, Nagaoka University of Technology)
- Published : 2005.08.18
Abstract
Keywords