마이크로 적층형 압전밸브의 제작과 그 특성

Fabrication of a Micro Multilayer Piezo Actuator Valve and Its Characteristics

  • 정귀상 (울산대학교 공과대학 전기전자정보시스템공학부) ;
  • 김재민 (울산대학교 공과대학 전기전자정보시스템공학부) ;
  • 조상복 (울산대학교 공과대학 전기전자정보시스템공학부)
  • 발행 : 2005.11.26

초록

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}pa$. $m^3/cm^2$.

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