Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.05b
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- Pages.135-139
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- 2005
A Study on the Microstructure and Thermal Sensor Devices of the Thin Films in the $BaTiO_3$ Systems
$BaTiO_3$ 계 세라믹의 미세구조와 열전센서에 관한 연구
- Song, Min-Jong (Department of Medical Information Engineering, Kwang-Ju Health College)
- 송민종 (광주보건대학 의료정보공학과)
- Published : 2005.05.27
Abstract
Thin films of
Keywords
- rf/dc magnetron sputter;
- X-ray diffraction patterns;
- $BaTiO_3$ ceramic thin films;
- Far-Infrared Radiation;
- poly-crystallization