Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characterization of High-K Embedded Capacitor in Low Temperature Co-fired Ceramic

고 유전율 저온 동시 소성 세라믹으로 제작된 초고주파용 캐패시터의 특성연구

  • Ahn, Min-Su (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
  • Kang, Jung-Han (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
  • Yun, Il-Gu (Dept. of Electrical and Electronic Engineering, Yonsei University)
  • 안민수 (연세대학교 전기전자공학과) ;
  • 강정한 (연세대학교 전기전자공학과) ;
  • 윤일구 (연세대학교 전기전자공학과)
  • Published : 2005.07.07
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Abstract

The properties such as capacitance and resonant frequency are important in embedded capacitors. Accurate equivalent model is required to find these properties of embedded capacitor. In this paper, we investigate to analyze the properties of high-K embedded capacitor which was fabricated by Low Temperature Co-fired Ceramic (LTCC). Modeling based on partial element equivalent circuit (PEEC) method is performed using HSPICE circuit simulation. This modeling methodology can provide the good inspection of embedded capacitor to device engineer.

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