Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 2005.02a
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- Pages.78-79
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- 2005
Dependence of Decomposition Process of PtO$_X$ Film on Temperature and Oxygen rate Investigated by in situ Ellipsometry
In situ 타원법을 이용한 PtO$_X$ 박막의 온도 및 산소조성비의 변화에 따른 연구
Abstract
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