한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2005년도 춘계학술대회 논문집
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- Pages.1988-1991
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- 2005
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- 2005-8446(pISSN)
전자기력을 이용한 마이크로 유체구동기의 설계
Design of a micro fluid actuator driven by electromagnetic force
초록
A micro fluid actuator driven by electromagnetic force at MEMS(Micro Electro Mechanical System) level has been designed. The operation of the actuator was simulated in three steps. First, fluid flow analysis has been performed to determine the actuator load. With the load, dynamic behavior of the actuator structure has been analysed. Finally, fluid-structure interaction analysis has been performed to predict the performance of the actuator. To avoid excessive amount of computation, axisymmetric and plane strain 2-D models were used.
키워드