• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1988-1991
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• 2005

A micro fluid actuator driven by electromagnetic force at MEMS(Micro Electro Mechanical System) level has been designed. The operation of the actuator was simulated in three steps. First, fluid flow analysis has been performed to determine the actuator load. With the load, dynamic behavior of the actuator structure has been analysed. Finally, fluid-structure interaction analysis has been performed to predict the performance of the actuator. To avoid excessive amount of computation, axisymmetric and plane strain 2-D models were used.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.932-937
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• 2002

The polyimide nozzle and silicon restrictor inside a thermal micro actuator have been fabricated using state of the art laser micromachining methods. Numerical models of fluid dynamics inside the actuator chamber and nozzle are presented. The models include fluid flow from reservoir, bubble formation and growth, ejection through the nozzle, and dynamics of refill through restrictor. Since high tapered nozzle and restrictor are very important parameters for overall actuator performance design, a special setup for the beam delivery system has been developed. The effects of variations of nozzle thickness, diameter, taper angles, and restrictor shapes are simulated and some results are compared with the experimental results. It is fecund that the fluid ejection through the thinner and high tapered nozzle is more steady, fast, and robust and the tapered restrictor shows more satisfying refill than the zero taper one.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.951-955
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• 2004

Piezoelectric(PZT) actuator can substitute for solenoid which is used in fluid control field because it has faster response times and no possibility of explosion. Besides, it is available in a high temperature and it has low energy consumption. In this study, pneumatic micro valve, bimorph type PZT actuator using the softner type PZT, carbon plate as a shim and its controller circuit were suggested and investigated. Performance tests and characteristics analysis, such as displacement, force, hysteresis and frequency properties, were carried out. The displacement of the actuator measured at the end point was 63 ${\mu}m$., force of the actuator was 0.052 N and maximum operating frequency was 15Hz. Also, characteristics of the micro valve with PZT actuator were evaluated in a testing system. The results show that the suggested PZT actuator is suitable for micro valve.

• Journal of Powder Materials
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• v.15 no.1
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• pp.46-52
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• 2008

The restrictor, which is a fluid channel from a reservoir to a chamber inside a thermal micro actuator, has been fabricated using ArF and KrF excimer lasers, Diode-Pumped Solid State Lasers (DPSSL) and femtosecond lasers for a feasibility study. A numerical model of fluid dynamics for the actuator chamber and restrictor is presented. The model includes bubble formation and growth, droplet ejection through nozzle, and dynamics of fluid refill through the restrictor from a reservoir. Since an optimized and well-fabricated restrictor is important for a high frequency actuator, some special beam delivery setups and post processing techniques have been researched and developed. The effects of variations of the restrictor length, diameter, and tapered shapes are simulated and the results are analyzed to determine the optimal design. The numerical results of droplet velocity and volume are compared with the experimental results of a cylindrical-shaped actuator. It is found that the micro actuators having tapered restrictors show better high frequency characteristics than those having a cylindrical shape without any notable decrease of droplet volume. The laser-fabricated restrictors demonstrate initial feasibility for the laser direct ablation technique although more development is required.

• Journal of Advanced Marine Engineering and Technology
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• v.38 no.10
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• pp.1232-1236
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• 2014

Numerical models of fluid dynamics inside the micro actuator chamber and nozzle are presented. The models include ink flow from reservoir, bubble formation and growth, ejection through the nozzle, and dynamics of refill process. Since high tapered nozzle is one of the very important parameters for overall actuator performance design. The effects of variations of nozzle thickness, diameter, and taper angles are simulated and some results are compared with the experimental results. It is found that the ink droplet ejection through the thinner and high tapered nozzle is more steady, fast, and robust.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.26 no.5
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• pp.511-517
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• 2016

This paper presents dynamic characteristics of a new actuator using magneto-rheological(MR) fluid between two electrode type coils. The concept of the actuator is to strengthen the force due to the magnetic field produced by the electrode-coil for MR fluid. The amount and direction of current input to the electrode-coils decide the characteristics of contraction-mode and extension-mode. For achieving the required actuating displacement and actuating force, the yield stress of the MR fluid between two electrode-coils is precisely changed by the input current. In this work, the MR fluid is operated in squeeze mode. The experimental results shown in this paper depict that it can be applied in the micro-level displacement and vibration control system.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.1023-1025
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• 1998

This paper presents the fabrication of a micro pump consisting of a pair of Al f1ap wave and a phase change actuator. The phase change actuator is composed of a heater, a silicone rubber diaphragm and a working liquid chamber. The diaphragm is actuated by the evaporation and the condensation of the working liquid. The actuator pumps fluid through the valves. The micro pump is fabricated by the anisotropic etch, the boron deposition and the metal evaporation. The forward and the backward flow characteristics of the f1ap valves were obtained. Also, the flow rate of the micro pump has been measured. When the square wave input of 12 V, 60% duty ratio and 0.2 Hz is applied, the average flow rate is $0.15{\mu}{\ell}/sec$ for zero pressure difference.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.473-474
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• 2007

• Journal of Biomedical Engineering Research
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• v.14 no.2
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• pp.147-153
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• 1993

In this paper, we studied about the micro pressure transmission system using fluid. For the investigation of feasibility of microhydraulic system, the hydraulic characteristics were examined by using the capillary tube system and the micro cylinder system that consists of a rod and a micro capillary tube. A new hydraulic micro actuator using magnetic fluid and an external magnetic field was also investigated. The results showed that our microhydraulic system has the possibility of power transmission in arbitrary directions.

• Proceedings of the KOSOMBE Conference
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• v.1995 no.11
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• pp.52-56
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• 1995

At present many kinds of micro actuators and micro mechanical components have been studied, but force transmission to arbitary direction is difficult using the current method. To solve this problem, a micro hydraulic system is expected to be useful. Force transmission to arbitary direction is necessary to development of medical use micromachine. In this paper, we studied about micro hydraulic system and magnetic fluid micro actuator and micro rapid prototyping system. The result of this studies indicated that possibility of the power transmission that using the micro cylinder system.