초록
Many studies have been carried out to produce 3D features in the size range between $10{\mu}m\~10,000{\mu}m$, called Meso-scale. If these miniaturized systems have high relative accuracy and good volumetric utilization, it is possible to manufacture more complex and accurate shapes with various materials as well as there are advantages of reducing energy, space and resources. Due to imperfect components and misalignment in assembly, it is necessary to assess the accuracy of the miniaturized system itself to obtain high relative accuracy. Laser interferometers are widely used to measure geometric errors called as quasi-static errors. For miniaturized system, however, it is difficult to install the required accessories such as optics and the measuring range is limited because of the size of the system and also this method is very expensive. Moreover, it is impossible to measure each error component simultaneously. A new system to measure simultaneously multiple geometric errors is proposed using capacitance sensors. Each error was measured using capacitance sensors and a measurement algorithm was mathematically derived. The experiments show that the proposed measurement system can be used effectively to assess the accuracy of miniaturized system at a low cost.
