한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)

한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

근접상 주사 현미경(NSOM)을 이용한 금(Au)나노입자의 패터닝과 기술응용

Nano-scale Au nanopaticles Pattern and Application by Using NSOM Lithography

  • Huh K.S. (Korea Institute of Machinery & Materials) ;
  • Chang W.S. (Korea Institute of Machinery & Materials)
  • 발행 : 2005.06.01
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초록

Self-assembled monolayers (SAMs) formed by the adsorption of alkanethiols, $HS(CH_2)_nX$, where X is an organic functional group, onto gold surfaces have attracted widespread interest as templates for the fabrication of molecular and biomolecular microstructures. Previously photopatterning has been thought of as being restricted to the micron scale, because of the wellknown diffraction limit. So, we have explored a novel approach to nanofabrication by utilizing a femtosecond laser coupled to a near-field scanning optical microscope (NSOM).

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