한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2005년도 춘계학술대회 논문집
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- Pages.1277-1280
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- 2005
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- 2005-8446(pISSN)
유기 박막 트랜지스터 회로를 위한 섀도 마스크의 제작
Fabrication of a shadow mask for OTFT circuit
- 이상민 (삼성전자㈜ LCD총괄) ;
- 박민수 (서울대 기계항공공학부 대학원) ;
- 이영수 (서울대 기계항공공학부) ;
- 이해성 (서울대 정밀기계설계공동연구소) ;
- 주종남 (서울대 기계항공공학부)
- Yi S.M. (Samsung electronics Inc.) ;
- Park M.S. (Sch. of Mech. and Aero. Eng., SNU) ;
- Lee Y.S. (Sch. of Mech. and Aero. Eng., SNU) ;
- Lee H.S. (IAMD, SNU) ;
- Chu C.N. (Sch. of Mech. and Aero. Eng., SNU)
- 발행 : 2005.06.01
초록
A high-aspect-ratio and high-resolution stainless steel shadow mask for organic thin-film transistors (OTFTs) circuit has been fabricated by a new method which combines photochemical machining, micro-electrical discharge machining (micro-EDM), and electrochemical etching (ECE). First, connection lines and source-drain holes are roughly machined by photochemical etching, and then the part of source and drain holes is finished by the combination of micro-EDM and ECE processes. Using this method a