Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2005.06a
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- Pages.1236-1239
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- 2005
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- 2005-8446(pISSN)
Growth of Carbon Nanotubes using Plasma-Enhanced Chemical Vapor Deposition
플라즈마 CVD 를 이용한 탄소나노튜브의 성장
Abstract
Aligned carbon nanotubes(CNTs) array were synthesized using DC plasma-enhanced chemical vapor deposition. Silicon substrate Ni-coated of 5nm thickness were pretreated by
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