유정압테이블의 위치결정오차요인 분석

Analysis of Positioning Error Factors in the Hydrostatic Tables

In this paper, For improving the positioning accuracy of hydrostatic table, relationship between temperature of atmosphere and thermal characteristics of hydrostatic table is analyzed, and influence of thermal characteristics on positioning accuracy is also analyzed experimentally. From the experimental results, it is confirmed that positioning error and repeatability is $0.21{\mu}m\;and\;0.18{\mu}m$ when the laser scale which has $0.01{\mu}m$ of resolution is used as feed-back unit. and also confirmed that thermal deformation of scale and supporter, which occurs by the temperature variation of atmosphere, works as limit of repeatability in long time operation.