한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2005년도 춘계학술대회 논문집
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- Pages.769-772
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- 2005
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- 2005-8446(pISSN)
능동제어모세관을 이용한 초정밀 유정압테이블의 5 자유도 운동 오차 보정
Compensation of Five DOF Motion Errors in a Ultra Precision Hydrostatic Table Using the Active Controlled Capillaries
초록
Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16