한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2005년도 춘계학술대회 논문집
- /
- Pages.686-689
- /
- 2005
- /
- 2005-8446(pISSN)
정전력 구동기의 동특성 해석
A Study on Dynamic Analysis of the Electrostatic Actuator
초록
A numerical simulation method is developed to analyze the dynamic response of a cantilever switch, which is driven by electrostatic force and a basic component of electro-mechanical coupled system. First, point-charges model on conductor is proposed as a lumped parameter of electrical part. Then, this model is easily incorporated into a multi-body dynamics analysis algorithm, the generalized recursive dynamics formula previously developed by our research group. The resulting motion of a coupled overall system is formulated as a differential algebraic equation form including electrical and mechanical variables together. The equation is simultaneously solved in every time step. To implement this approach into the useful dynamics analysis tool, we used multibody dynamics software (RecurDyn) based on the generalized recursive formula using relative coordinate. The developed numerical simulation tool is evaluated by applying to many different driving condition and switch configuration. The final analysis model will be added to RecurDyn as a basic module for dynamics analysis of electro-mechanical coupled system.