한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2005년도 춘계학술대회 논문집
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- Pages.657-662
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- 2005
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- 2005-8446(pISSN)
레이저 국소증착을 이용한 TFT-LCD 회로수정 패턴제조
Laser-induced chemical vapor deposition of micro patterns for TFT-LCD circuit repair
- 박종복 (광주과학기술원 대학원 기전공학과) ;
-
정성호
(광주과학기술원 기전공학과) ;
- 김창재 (LG 전자 생산기술원) ;
- 박상혁 (LG 전자 생산기술원) ;
- 신평은 (LG 전자 생산기술원) ;
- 강형식 (LG 전자 생산기술원)
- Park Jong-Bok (Dept. Mechatronics. GIST) ;
-
Jeong Sungho
(Dept. Mechatronics. GIST) ;
- Kim Chang-Jae (LG-PRC) ;
- Park Sang-Hyuck (LG-PRC) ;
- Shin Pyung-Eun (LG-PRC) ;
- Kang Hyoung-Shik (LG-PRC)
- 발행 : 2005.06.01
초록
In this study, the deposition of micrometer-scale metallic interconnects on LCD glass for the repair of open-circuit type defects is investigated. Although there had been a few studies Since 1980 s for the deposition of metallic interconnects by laser-induced chemical vapor deposition, those studies mostly used continuous wave lasers. In this work, a third harmonic Nd:YLF laser (351nm) of high repetition rates, up to 10 KHz, was used as the illumination source and