한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)

한국정밀공학회 (Korean Society for Precision Engineering)
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정밀저울을 이용한 원자힘 현미경 캔티레버의 특성평가

Atomic Force Microscope Probe Calibration by use of a Commercial Precision Balance

  • Kim M.S. (Division of Physical Metrology, KRISS) ;
  • Choi I.M. (Division of Physical Metrology, KRISS) ;
  • Park Y.K. (Division of Physical Metrology, KRISS) ;
  • Choi J.H. (Division of Physical Metrology, KRISS) ;
  • Kim J.H. (Division of Physical Metrology, KRISS)
  • 발행 : 2005.06.01
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초록

In this paper, we investigate the characteristics of a piezoresistive AFM cantilever in the range of $0\~30{\mu}N$ by using nano force calibrator (NFC), which consists of a high precision balance with resolution of 1 nN and 1-D fine positioning stage. Brief modeling of the cantilever is presented and then, the calibration results are shown. Tests revealed a linear relationship between the probing force and sensor output (resistance change), and the force vs. deflection. From this relationship, the force constant of the cantilever was calculated to 3.45 N/m with a standard deviation of 0.01 N/m. It shows that there is a big difference between measured and nominal spring constant of 1 N/m provided by the manufacturer s specifications.

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