Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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High-Tc Superconducting Bi-Sr-Ca-Cu-O Thin Films prepared by Sputter Deposition

스퍼터 증착법으로 제작한 Bi-Sr-Ca-Cu-O 고온 초전도 박막

  • Cheon, Min-Woo (Department of Electrical & Electronic Engineering, Dongshin Univ.) ;
  • Yang, Sung-Ho (Department of Electrical & Electronic Engineering, Dongshin Univ.) ;
  • Park, No-Bong (Department of Electrical & Electronic Engineering, Dongshin Univ.) ;
  • Park, Yong-Pil (Department of Electrical & Electronic Engineering, Dongshin Univ.)
  • Published : 2005.11.10
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Abstract

Bi-Sr-Ca-Cu-O thin films have been fabricated by sputter deposition method. During the deposition, 10 and 90 wt%-ozone/oxygen mixture gas of typical pressure of $1\sim9\times10^{-5}$ Torr are supplied with ultraviolet light irradiation for oxidation. XRD and RHEED investigations reveal out that a buffer layer with some different compositions is formed at the early deposition stage of less than 10 units cell and then Bi-2201 oriented along the c-axis is grown.

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