한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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- Pages.187-188
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- 2005
MEMS switch 응용을 위한 free standing 금속 구조물에 관한 연구
A free standing metal structures for MEMS switches
- 황현석 (성균관대학교 정보통신공학부) ;
- 김응권 (성균관대학교 정보통신공학부) ;
- 강현일 (성균관대학교 정보통신공학부) ;
- 이규일 (성균관대학교 정보통신공학부) ;
- 이태용 (성균관대학교 정보통신공학부) ;
- 송준태 (성균관대학교 정보통신공학부)
- Hwang, Hyun-Suk (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Kim, Eung-Kwon (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Kang, Hyun-Il (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Lee, Kyu-Il (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Lee, Tae-Yong (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Song, Joon-Tae (School of Information and Communication Engineering, Sungkyunkwan University)
- 발행 : 2005.11.10
초록
In this paper, big free standing metal structures for electrostatic MEMS switches are easily fabricated using photoresist sacrificial layer. The entire process sequence, through the removal of the sacrificial layer, is kept below 150