한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
- /
- Pages.101-102
- /
- 2005
스퍼터 압력에 따른 태양전지용 CdTe 박막의 구조적, 광학적 특성
Influence of Sputter Pressure on the Structural and Optical Properties of CdTe for Solar Cell Applications
-
Lee, J.H.
(Kunsan Nat. Univ.)
;
- Choi, S.H. (Kunsan Nat. Univ.) ;
- Lee, D.J. (Kunsan Nat. Univ.) ;
-
Lee, J.I.
(Kunsan Nat. Univ.)
;
-
Lim, D.G.
(Chungju Nat. Univ.)
;
- Yang, K.J. (Chungju Nat. Univ.) ;
-
Yi, J.
(Sungkyumkwan Univ.)
- 발행 : 2005.11.10
초록
Cadmium telluride (CdTe) films have been prepared on Coming 7059 glass, molybdemium (Mo), and polyimide (PI) substrates by r.f. magnetron sputtering technique. The influence of the sputter pressure on the structural and optical properties of these films was evaluated. In addition, a comparison of the properties of the films deposited on different substrates was performed.