Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.11a
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- Pages.45-46
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- 2005
Piezoelectric Microspeaker by Using Micromachining Technique
마이크로머시닝 기술을 이용한 압전형 마이크로스피커
- Suh, Kyong-Won (Chungju National University) ;
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Yi, Seung-Hwan
(Chungju National University) ;
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Ryu, Kum-Pyo
(Korea University) ;
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Min, Nam-Ki
(Korea University)
- Published : 2005.11.10
Abstract
The piezoelectric ZnO thin films were deposited onto Al/Si substrate in order to figure out the crystalline and the residual stress of deposited films. As the
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