Design of X-Y Actuator with High Vibration Resistance lot Probe-based Data Storages

탐침형 정보저장장치용 이차원 구동기의 내진 구조

We report the new design of a miniature electromagnetic actuator for probe-based data storage with anti-vibration mechanism. The actuator consists of a media substrate, silicon frame, 2 pairs of magnets, a spacer, and a printed circuit board (PCB). The total area of the device is $11.2{\times}11.2 mm^2$ while the data recording area is $7.4{\times}7.4 mm^2$. A net momentum fee structure was included for high vibration resistance. The simulation shows that the lateral vibration can be reduced to below 100 nm for 1 G acceleration if the counter mass is adjusted with $1\%$ difference. The peak power for ${\pm}50 {\mu}m$ displacement is below 50 mW for a actuator with a resonance at 200 Hz.