한국마이크로전자및패키징학회:학술대회논문집 (Proceedings of the International Microelectronics And Packaging Society Conference)
- 한국마이크로전자및패키징학회 2005년도 ISMP
- /
- Pages.249-272
- /
- 2005
Low Temperature Hermetic Packaging for MEMS Devices
- Choi Won Kyoung (Packaging Center, Samsung Advanced Institute of Technology) ;
- Wang Qian (Packaging Center, Samsung Advanced Institute of Technology) ;
- Kim Won Bae (Packaging Center, Samsung Advanced Institute of Technology) ;
- Moon Changyoul (Packaging Center, Samsung Advanced Institute of Technology)
- 발행 : 2005.09.01