대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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- Pages.2424-2426
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- 2005
ICP 광원 시스템의 Ne:Xe Ne:Ar 혼합가스의 전자온도 및 전자밀도의 특성 연구
The Electron temperature and Density properties of Mixing gas in ICP Lighting system(Ne:Xe, Ne:Ar)
- Choi, Gi-Seung (Wonkwang University) ;
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Lee, Jonh-Chan
(Kumho Electric, INC.) ;
- Choi, Yong-Sung (Wonkwang University) ;
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Park, Dae-Hee
(Wonkwang University)
- 발행 : 2005.07.18
초록
In whole world consciousness of environment maintenance have increased very quickly for he end of the 20th century. To use and disuse toxic substances have been controled at the field of industry. Also the field of lighting source belong to environmental control. And in the future the control will be strong. In radiational mechanism of fluorescence lamp mercury is the worst environmental problem. In radiational mechanism of fluorescence lamp mercury is the worst environmental problem root. In the mercury free lighting source system the Xe gas lamp is one type. And the Ne:Xe and Ne:Ar mixing gas lamp improvements firing voltage of Xe gas lamp. Purpose and subject of this study are understand, efficiency, ideal of Ne:Xe and Ne:Ar plasma which mercury free lamp. Before ICP was designed, basic parameters of plasma, which are electron temperature and electron density, were measured and calculated by langmuir probe data. Property of electron temperature and electron density were confirmed by changing ratio of Ne:Xe and Ne:Ar.
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