Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2005.07c
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- Pages.2410-2412
- /
- 2005
Porous silicon-based chemical and biosensors
다공질 실리콘 구조를 이용한 화학 및 바이오 센서
- Kim, Yun-Ho (Korea University) ;
- Park, Eun-Jin (Korea University) ;
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Choi, Woo-Seok
(Korea University) ;
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Hong, Suk-In
(Korea University) ;
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Min, Nam-Ki
(Korea University)
- Published : 2005.07.18
Abstract
In this study, two types of PS substrate were fabricated for sensing of chemical and biological substances. For sensing of the humidity and chemical analyzes such as
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