GaAs-MMIC Process Optimization Using Microstrip Line

마이크로스트립 선로를 이용한 GaAs-MMIC 제작공정 최적화

  • Thakur, J.P. (School of Electrical and Electronics Engineering, Kookmin Univ.) ;
  • Son, Chang-Sin (School of Electrical and Electronics Engineering, Kookmin Univ.) ;
  • Park, Jun-Seok (School of Electrical and Electronics Engineering, Kookmin Univ.) ;
  • Cho, Hong-Goo (School of Electrical and Electronics Engineering, Kookmin Univ.) ;
  • Kim, Hyeong-Seok (School of Electrical and Electronics Engineering, Chung-Ang Univ.)
  • Published : 2005.07.18

Abstract

This paper presents optimization of GaAs substrate thickness for GaAs-MMIC processes at high frequencies using a multidielectric microstrip line, that is fabricated using MMIC process

Keywords