Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2004.08a
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- Pages.129-129
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- 2004
Investigation of thermal stability of strained Si on relaxed SiGe layer
- Jang, C.H. (Dept. of Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Lee, J.W. (Dept. of Advanced MaterialsEngineering, Sungkyunkwan University) ;
- Yang, C.W. (Dept. of Advanced MaterialsEngineering, Sungkyunkwan University) ;
- Sardela Jr., M. R. (The Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign) ;
- Song, Y.J. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
- Shim, K.H. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
- Lee, N.E. (Dept. of Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2004.08.19
Abstract
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