Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2004.08a
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- Pages.76-76
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- 2004
Introduction to poly etcher using VHF-ICP source for next generation etch processing
- Kwon, Gi-Chung (Jusung Engineering Co., Ltd.) ;
- Kim, Hong-Seub (Jusung Engineering Co., Ltd.) ;
- Choi, Seong-Hyuk (Jusung Engineering Co., Ltd.) ;
- Lee, Y.K. (Department of Physics, KAIST) ;
- Chang, H.Y. (Department of Physics, KAIST)
- Published : 2004.08.19
Abstract
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