Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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Development of Micro-machined Heat Flux Sensor by using MEMS technology

MEMS를 이용한 미세 열유속센서의 개발

  • 양훈철 (포항공과대학교 대학원 기계공학과, 한국에너지기술연구원 건물에너지연구센터) ;
  • 송철화 (한국원자력연구소 열수력 안전연구팀) ;
  • 김무환 (포항공과대학교 기계공학과)
  • Published : 2004.04.28
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Abstract

New method for the design, fabrication, and calibration of micro-machined heat flux sensor has been developed. Two types of micro-machined heat flux sensor having different thicknesses of the thermal-resistance layer are fabricated using the MEMS technique. Photo-resist patterning using a chrome mask, bulk-etching and copper-nickel sputtering using a shadow mask are applied to make heat flux sensors, which are calibrated in the convection-type heat flux calibration facility. The sensitivity of the device varies with thermal-resistance layer, and hence can be used to measure the heat flux in heat-transfer phenomena.

Keywords