Design and Analysis of Linear Ultrasonic Motor Using two Langevin Type Transducer

2개의 Langevin 진동자를 이용한 선형 초음파 모터의 설계와 해석

Transducer for ultrasonic linear motor with the symmetric and anti-symmetric modes was studied. The ultrasonic liner motor consists of two Lngevin type piezoelectric vibrators that cross at right angles with each other in tip. In order to excite symmetric and anti-symmetric mode, the transducer must have a 90 degree phase difference of voltage. Therefore, the tip of transducer moves on an elliptical motion. In this paper, the finite element analysis was used. The ultrasonic motor was fabricated using the simulated result and the driving characteristics were measured.