Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.04b
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- Pages.5-8
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- 2004
Electrical Properties of $TiO_2$ and $Al_2O_3/TiO_2$ Thin Films Deposited by E-beam Evapration
전자빔 증착법에 의한 $TiO_2$ 박막 및 $Al_2O_3/TiO_2$ 박막의 전기적 특성
- Ryu, Hyun-Wook (RIERT Chosun Uni.) ;
- Park, Jin-Seong (Dep. of Advanced Materials Engineering Chosun Uni.)
- Published : 2004.04.24
Abstract
전자빔 증착법 (e-beam evaporation)를 이용하여