한국정보디스플레이학회:학술대회논문집

한국정보디스플레이학회 (The Korean Infomation Display Society)
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Indium tin oxide films grown on polymer substrate by a low-frequency magnetron sputtering method

  • Jung, Sang-Kooun (Department of Physics, Kyungpook National University) ;
  • Kim, Hong-Tak (PDP division of LG electronics) ;
  • Lee, Do-Kyung (Gumi Institute of Electronics Technology) ;
  • Cho, Yong (Department of Physics, Kyungpook National University) ;
  • Park, Lee-Soon (Department of Polymer Science, Kyungpook National University) ;
  • Park, Duck-Kyu (Department of Physics, Kyungpook National University) ;
  • Sohn, Sang-Ho (Department of Physics, Kyungpook National University)
  • 발행 : 2004.08.23
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초록

In this study, we have grown indium tin oxide (ITO) thin films by using a low-frequency (60${\sim}$300 Hz) magnetron sputtering method and investigated characteristics of ITO thin films deposited on polyethersulfone substrates. The experimental results show that the films have good qualities in surface morphology, transmittance, and electrical conduction.

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